• DocumentCode
    887576
  • Title

    An ion-implanted subsurface monolithic Zener diode

  • Author

    Lui, Sik ; Meyer, Robert G. ; Kwan, Norman

  • Volume
    14
  • Issue
    4
  • fYear
    1979
  • Firstpage
    782
  • Lastpage
    784
  • Abstract
    A new ion-implanted subsurface Zener diode structure compatible with bipolar monolithic technology is described. A well-controlled p-implant level determines the breakdown voltage of 6.17 V with a typical measured standard deviation less than 20 mV. The measured long-term stability of the resulting diode was better than 1 mV after continuous operation at 125/spl deg/C for 100h. Temperature compensation of the diode yielded a 6.70 V reference with a temperature coefficient less than 9 ppm//spl deg/C.
  • Keywords
    Ion implantation; Zener diodes; ion implantation; Breakdown voltage; Circuit theory; Diodes; Electric breakdown; Measurement standards; Operational amplifiers; Stability; Temperature; Transfer functions;
  • fLanguage
    English
  • Journal_Title
    Solid-State Circuits, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9200
  • Type

    jour

  • DOI
    10.1109/JSSC.1979.1051266
  • Filename
    1051266