Packaging Effect on MEMS Pressure Sensor Performance

Author

Krondorfer, Rudolf H. ; Kim, Yeong K.

Author_Institution

SensoNor asa, Horten

Volume

30

Issue

2

fYear

2007

fDate

6/1/2007 12:00:00 AM

Firstpage

285

Lastpage

293

Abstract

In this study, the effect of epoxy based molding compound packaging on a micro-electro-mechanical system (MEMS) pressure sensor performance is investigated. A series of experiments were conducted to characterize the MEMS sensor over temperature and pressure changes by measuring output voltage signals. The sensor was modeled by a finite element method to investigate the stress developments. The molding compound was assumed as elastic and viscoelastic material to examine the material modeling effect on the calculation results. The model was verified by comparing the calculated results with experimental data. It was found that the stress induced by the molding compound had significant influence on the sensor performance, and the accuracy of the calculations was highly dependent on the modeling of the molding compound. Based on the results, the mechanism of the stress development and its effect on the sensor signal were discussed

Keywords

elasticity; finite element analysis; microsensors; moulding; plastic packaging; pressure sensors; viscoelasticity; MEMS pressure sensor; elastic material; epoxy based molding; finite element method; microelectro-mechanical system pressure sensor; molding compound; packaging effect; packaging stress; plastic packaging; viscoelastic material; Conducting materials; Microelectromechanical systems; Micromechanical devices; Packaging; Pressure measurement; Sensor phenomena and characterization; Sensor systems; Stress; Temperature sensors; Voltage measurement; Finite element method (FEM); micro-electro-mechanical system (MEMS) package; packaging stress; plastic packaging; viscoelasticity;

fLanguage

English

Journal_Title

Components and Packaging Technologies, IEEE Transactions on

Publisher

ieee

ISSN

1521-3331

Type

jour

DOI

10.1109/TCAPT.2007.898360

Filename

4214944