Title :
On-chip solenoid inductors with high quality factor for high frequency magnetic integrated circuits
Author :
Chang, Ming-Hui ; Lin, Ken-Huang ; Huang, Jung-Wei ; Chu, Ann-Kuo
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
fDate :
4/1/2006 12:00:00 AM
Abstract :
On-chip solenoid inductors for high frequency magnetic integrated circuits are proposed. The eddy current loss was reduced by dividing the inductor into three consecutive inductors connected in series. The inductor has an inductance of 1.1nH and the maximum quality factor (Qmax) of 50.5. The self-resonant frequency and the operating frequency at Qmax are greater than 17.5GHz and 16.7GHz, respectively.
Keywords :
Q-factor; eddy current losses; inductors; magnetic circuits; microwave integrated circuits; solenoids; system-on-chip; eddy current loss; high frequency magnetic integrated circuits; high quality factor; maximum quality factor; on-chip solenoid inductors; Copper; Eddy currents; Fabrication; Frequency; Inductance; Inductors; Q factor; Solenoids; Sputter etching; Substrates; Eddy currents; inductance; operating frequency; quality factor; self-resonant frequency; solenoid inductors;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2006.872119
