• DocumentCode
    889190
  • Title

    A proposed ultra-sensitive miniature temperature sensor

  • Author

    Wooten, F.T.

  • Author_Institution
    Research Triangle Institute, Research Triangle Park, N. C.
  • Volume
    55
  • Issue
    4
  • fYear
    1967
  • fDate
    4/1/1967 12:00:00 AM
  • Firstpage
    564
  • Lastpage
    564
  • Abstract
    A proposed temperature sensor is described which consists of a pyroelectric material on the gate of an MOS transistor. Analysis of the device shows a sensitivity of 6.6 × 10-9°C is possible.
  • Keywords
    Charge measurement; Crystalline materials; Crystals; Current measurement; Leak detection; MOSFETs; Pyroelectricity; Temperature distribution; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1967.5590
  • Filename
    1447520