Title :
A proposed ultra-sensitive miniature temperature sensor
Author_Institution :
Research Triangle Institute, Research Triangle Park, N. C.
fDate :
4/1/1967 12:00:00 AM
Abstract :
A proposed temperature sensor is described which consists of a pyroelectric material on the gate of an MOS transistor. Analysis of the device shows a sensitivity of 6.6 × 10-9°C is possible.
Keywords :
Charge measurement; Crystalline materials; Crystals; Current measurement; Leak detection; MOSFETs; Pyroelectricity; Temperature distribution; Temperature measurement; Temperature sensors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1967.5590
