DocumentCode
889190
Title
A proposed ultra-sensitive miniature temperature sensor
Author
Wooten, F.T.
Author_Institution
Research Triangle Institute, Research Triangle Park, N. C.
Volume
55
Issue
4
fYear
1967
fDate
4/1/1967 12:00:00 AM
Firstpage
564
Lastpage
564
Abstract
A proposed temperature sensor is described which consists of a pyroelectric material on the gate of an MOS transistor. Analysis of the device shows a sensitivity of 6.6 × 10-9°C is possible.
Keywords
Charge measurement; Crystalline materials; Crystals; Current measurement; Leak detection; MOSFETs; Pyroelectricity; Temperature distribution; Temperature measurement; Temperature sensors;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1967.5590
Filename
1447520
Link To Document