Title :
A new planar microtransformer for use in micro-switching converters
Author :
Mino, Masato ; Yachi, Toshiaki ; Tago, Akio ; Yanagisawa, Keiichi ; Sakakibara, Kazuhiko
Author_Institution :
NTT Interdisciplinary Res. Lab., Tokyo, Japan
fDate :
7/1/1992 12:00:00 AM
Abstract :
A planar microtransformer for use in microswitching converters of portable equipment is described. This microtransformer, consisting of planar coils and CoZrRe amorphous magnetic layers on a Si substrate, is fabricated by a dry process. It is about 0.3-mm thick, and 3×4 mm 2. Its coils provide a relatively high inductance of 33 nH/mm 2. This microtransformer is implemented in a forward converter, which operates well at 32 MHz
Keywords :
inductors; power convertors; power integrated circuits; transformer cores; 32 MHz; 5 to 40 MHz; CoZrRe amorphous magnetic layers; Si substrate; dry process; micro-switching converters; planar microtransformer; portable equipment; Amorphous magnetic materials; Amorphous materials; Coils; Fabrication; Frequency conversion; Ion beams; Sputter etching; Sputtering; Switching converters; Wounds;
Journal_Title :
Magnetics, IEEE Transactions on
