A switched-capacitor interface for capacitive pressure sensors

Author

Yamada, Mitsuhiro ; Takebayashi, Takashi ; Notoyama, Shun-Ichi ; Watanabe, Kenzo

Author_Institution

Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan

Volume

41

Issue

1

fYear

1992

fDate

2/1/1992 12:00:00 AM

Firstpage

81

Lastpage

86

Abstract

A switched-capacitor interface for a capacitive pressure sensor is developed which provides a linear digital output. It consists basically of a sample/hold circuit followed by a charge-balancing analog-to-digital converter. The sensor capacitance changes hyperbolically with an applied pressure. To convert the nonlinear capacitance change into the linear digital output, two linearization methods are investigated. In either method, a linear digital output with an accuracy higher than 8-b is obtained. Because of its high-accuracy capability and compatible fabrication process, the interface described is best suited for a smart silicon capacitive pressure sensor

Keywords

analogue-digital conversion; digital-analogue conversion; electric sensing devices; linearisation techniques; pressure transducers; sample and hold circuits; signal processing equipment; switched capacitor networks; Si; capacitive pressure sensors; charge-balancing analog-to-digital converter; diaphragm; differential integrator; linear digital output; linearization; nonlinear capacitance; sample/hold circuit; sensor capacitance; smart sensor; switched-capacitor interface; Analog-digital conversion; Bridge circuits; Capacitance; Capacitive sensors; Intelligent sensors; Piezoresistance; Sensor phenomena and characterization; Silicon; Temperature dependence; Temperature sensors;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.126637

Filename

126637