• DocumentCode
    891011
  • Title

    Base spreading resistance of polysilicon self-aligned bipolar transistors

  • Author

    Greeneich, Edwin W.

  • Author_Institution
    Center for Solid-State Electron. Res., Arizona State Univ., Tempe, AZ, USA
  • Volume
    36
  • Issue
    1
  • fYear
    1989
  • fDate
    1/1/1989 12:00:00 AM
  • Firstpage
    147
  • Lastpage
    149
  • Abstract
    The base spreading resistance and its variation with current are analyzed for bipolar transistor structures in which the extrinsic base contact region extends completely around the emitter region. An analytic expression for the resistance is derived that represents the limiting case of a small rectangular emitter structure with corner-rounding. Results of the analysis show good agreement with numerical simulation results. This approach has application in the modeling of modern small-geometry bipolar transistors
  • Keywords
    bipolar transistors; electric resistance; elemental semiconductors; semiconductor device models; silicon; analytical model; base spreading resistance; corner-rounding; extrinsic base contact region; modeling; numerical simulation; polysilicon self-aligned bipolar transistors; small rectangular emitter; Bipolar integrated circuits; Bipolar transistors; Boundary conditions; Contact resistance; Current density; Equations; Geometry; Lithography; Numerical simulation; Solid state circuits;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.21197
  • Filename
    21197