Compact silicon tunable Fabry-Perot resonator with low power consumption

Author

Barrios, C.A. ; Almeida, V.R. ; Panepucci, R.R. ; Schmidt, Bradley S. ; Lipson, M.

Author_Institution

Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA

Volume

16

Issue

2

fYear

2004

Firstpage

506

Lastpage

508

Abstract

We demonstrate a 20-μm-long tunable optical resonator integrated on a silicon-on-insulator waveguide. The microresonator consists of a planar Fabry-Perot microcavity defined by deep Si/SiO₂ Bragg reflectors with a high finesse of 11.2. The device is electrically driven and shows a modulation depth as high as 53% for a power consumption of only 20 mW.

Keywords

Fabry-Perot resonators; distributed Bragg reflectors; elemental semiconductors; micro-optics; microcavities; optical modulation; optical planar waveguides; optical tuning; silicon; silicon compounds; silicon-on-insulator; 20 mW; 20 mum; Si-SiO/sub 2/; Si/SiO/sub 2/ Bragg reflectors; SiO/sub 2/; compact silicon tunable Fabry-Perot resonator; low power consumption; microresonator; modulation depth; planar Fabry-Perot microcavity; silicon-on-insulator waveguide; tunable optical resonator; Energy consumption; Etching; Microcavities; Optical attenuators; Optical modulation; Optical resonators; Optical waveguides; Phase modulation; Silicon; Tunable circuits and devices;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2003.822251

Filename

1266472