Title :
Control issues for microelectromechanical systems
Author :
Borovic, B. ; Lewis, Frank L. ; Kolesar, E.S. ; Popa, Dan O.
fDate :
4/1/2006 12:00:00 AM
Abstract :
This paper highlights some microelectromechanical systems (MEMS) control issues and provides an overview of MEMS control.
Keywords :
closed loop systems; microcontrollers; micromechanical devices; open loop systems; stability; vibrations; MEMS control; closed loop system; lateral instability; microelectromechanical systems; open loop system; vibrational modes; Actuators; Control systems; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Open loop systems; Optical attenuators; Optical control; Optical fibers; Optical variables control;
Journal_Title :
Control Systems, IEEE
DOI :
10.1109/MCS.2006.1615266
