DocumentCode

892891

Title

Environmental control and cleanliness in the production of microcircuits

Author

Horne, Douglas F.

Volume

67

Issue

5

fYear

1988

fDate

5/1/1988 12:00:00 AM

Firstpage

22

Lastpage

24

fLanguage

English

Journal_Title

Production Engineer

Publisher

iet

ISSN

0032-9851

Type

jour

DOI

10.1049/tpe:19880108

Filename

4938381