DocumentCode
893222
Title
Fabrication of microcontact diodes using discontinuous thin metal deposits
Author
Sumner, G.G.
Volume
55
Issue
10
fYear
1967
Firstpage
1772
Lastpage
1773
Abstract
A novel method for fabricating very small metal-semiconductor contacts for high-frequency applications is described, together with results obtained by using this technique to produce extremely small Au-n-type GaAs Schottky barrier diodes.
Keywords
Capacitance measurement; Fabrication; Gallium arsenide; Gold; Probes; Schottky barriers; Schottky diodes; Semiconductor diodes; System identification; Tellurium;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1967.6004
Filename
1447934
Link To Document