Magnetic induction machines integrated into bulk-micromachined silicon

Author

Arnold, David P. ; Das, Sauparna ; Cros, Florent ; Zana, Iulica ; Allen, Mark G. ; Lang, Jeffrey H.

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

Volume

15

Issue

2

fYear

2006

fDate

4/1/2006 12:00:00 AM

Firstpage

406

Lastpage

414

Abstract

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni₈₀Fe₂₀, Co₆₅Fe₁₈Ni₁₇) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 μN·m.

Keywords

induction motors; magnetic devices; micromotors; rotors; bulk-micromachined silicon; electroplated materials; fusion-bonded silicon; machine structures; magnetic induction machines; silicon-based microengine power generation systems; tethered rotors; Batteries; Engines; Fabrication; Induction machines; Iron; Laboratories; Magnetic materials; Power generation; Rotors; Silicon; AC generators; MEMS; induction machines; magnetic materials; micromachining;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.873951

Filename

1618726