DocumentCode
895591
Title
An Advanced, Radiation Hardened Bulk CMOS/LSI Technology
Author
Schroeder, J.E. ; Lichtel, R.L. ; Gingerich, B.L.
Author_Institution
Harris Semiconductor, Programs Division P. O. Box 883, Melbourne, Fla. 32901
Volume
28
Issue
6
fYear
1981
Firstpage
4033
Lastpage
4037
Abstract
An advanced, second generation, bulk, Si-gate CMOS process is described. This process is capable of producing LSI and VLSI parts that are latch-up free and hardened to total dose levels in excess of 2 Ã 105 rad-Si for applications in space and weapons radiation environments. Two memories designed to use this process are also described. Both circuits are 4096-bit, static CMOS RAMs.
Keywords
CMOS process; CMOS technology; Circuits; Geometry; Implants; Large scale integration; Oxidation; Radiation hardening; Random access memory; Strips;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1981.4335669
Filename
4335669
Link To Document