DocumentCode
895759
Title
Energy Losses and Mean Free Paths of Electrons in Silicon Dioxide
Author
Ashley, J.C. ; Anderson, V.E.
Author_Institution
Health and Safety Research Division Oak Ridge National Laboratory Oak Ridge, Tennessee 37380
Volume
28
Issue
6
fYear
1981
Firstpage
4131
Lastpage
4136
Abstract
Theoretical models and calculations are combined with experimental optical data to determine a model energy-loss function for SiO2. Sum-rule checks and comparisons with experimental information are made to insure overall consistency of the model. The model energy-loss function is employed to calculate electron inelastic mean free paths and stopping powers for electrons with energies ¿ 10 keV in SiO2.
Keywords
Electron optics; Electronics industry; Energy exchange; Energy loss; Health and safety; Laboratories; Monte Carlo methods; Optical losses; Silicon compounds; Solid state circuits;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1981.4335688
Filename
4335688
Link To Document