Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Author

Hsu, Che-Lung ; Liu, Yung-Chih ; Wang, Chih-Ming ; Wu, Mount-Learn ; Tsai, Ya-Lun ; Chou, Yue-Hong ; Lee, Chien-Chieh ; Chang, Jenq-Yang

Author_Institution

Inst. of Opt. Sci., Nat. Central Univ., Jhongli, Taiwan

Volume

24

Issue

4

fYear

2006

fDate

4/1/2006 12:00:00 AM

Firstpage

1922

Lastpage

1928

Abstract

In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices, Δλ of the stopband at a transmission below 10% is 5.06 nm.

Keywords

band-stop filters; diffraction gratings; micromachining; optical design techniques; optical fabrication; optical filters; optical waveguides; silicon compounds; SiN; grating structure; guided-mode resonance; micromachining; optical design; optical fabrication; optical filter; silicon-nitride membrane; spectral response; transmission bandstop filter; waveguide structure; Biomembranes; Dielectric thin films; Gratings; Optical films; Optical filters; Optical modulation; Optical sensors; Optical waveguides; Resonance; Substrates; Bulk-micromachining; guided-mode resonance (GMR);

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2006.871117

Filename

1618783