• DocumentCode
    898386
  • Title

    Fabrication and Characteristics of Radial Position Sensitive Detectors

  • Author

    Hyder, S.Asad

  • Author_Institution
    EG&G ORTEC 100 Midland Road Oak Ridge, Tennessee 37830 USA
  • Volume
    29
  • Issue
    1
  • fYear
    1982
  • Firstpage
    782
  • Lastpage
    783
  • Abstract
    The paper discusses the fabrication and performance of radial position sensitive detectors, These detectors are made on n-type annular silicon wafers using boron implantation to form the resistive layer for charge division and for the junction. Aluminum is evaporated on the opposite side for the back contact. The detectors so obtained have typical position resolution of 0.6 mm and integral nonlinearity of better than 0.1% for 7 mm \n\n\t\t
  • Keywords
    Aluminum; Annealing; Boron; Fabrication; Face detection; Gold; Ion implantation; P-n junctions; Position sensitive particle detectors; Silicon;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1982.4335958
  • Filename
    4335958
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=898386