Trimming of Microstrip Circuits Utilizing Microcantilever Air Gaps (Correspondence)

A reliable method of tuning and microwave integrated circuit (MIC) line connection which has potential up to X band has been demonstrated. The method utilizes integrable fabricated microcantilever air gaps which are cold-deformed in situ to accomplish trimming. The advantages of this concept are 1) high open-circuit impedance, 2) low short-circuit insertion loss, 3) high trim resolution, 4) low line perturbation, 5) high mechanical stability, and 6) in situ fabrication with the rest of MIC circuitry.