DocumentCode
900688
Title
A cadmium sulfide-silicon composite resonator
Author
Page, D.J.
Volume
56
Issue
10
fYear
1968
Firstpage
1748
Lastpage
1749
Abstract
A cadmium sulfide-silicon composite resonator is discussed which could be used as a tuning device in silicon integrated circuits. The structure and fabrication of these devices are described, together with some measured electrical characteristics.
Keywords
Acoustic devices; Acoustic scattering; Cadmium compounds; Circuit optimization; Conductors; Fabrication; Frequency; Resonance; Resonator filters; Silicon;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1968.6733
Filename
1448663
Link To Document