DocumentCode
900849
Title
Properties of Microstrip Line on Si-SiO2 System
Author
Hasegawa, H. ; Furukawa, M. ; Yanai, H.
Volume
19
Issue
11
fYear
1971
Firstpage
869
Lastpage
881
Abstract
A parallel-plate waveguide model for the microstrip line formed on the Si-SiO/sub 2/ system is analyzed theoretically and the results are compared with the experiment. The experiment has been performed over wide ranges of frequency, substrate resistivity, and strip width. Existence of three types of fundamental modes is concluded and the condition for the appearance of each mode is clarified. In particular, the slow-wave mode is found to propagate within the resistivity-frequency range suited to the monolithic circuit technology, and its propagation mechanism is discussed. Approximate analysis of the fringing effect is also made for the slow-wave mode.
Keywords
Capacitance; Couplings; Dielectric substrates; Dielectric thin films; Microstrip; Microwave theory and techniques; Multiconductor transmission lines; Power transmission lines; Strips; Transmission line theory;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.1971.1127658
Filename
1127658
Link To Document