Title :
Geometrical Shaping of InGaN Light-Emitting Diodes by Laser Micromachining
Author :
Fu, W.Y. ; Hui, K.N. ; Wang, X.H. ; Wong, K. K Y ; Lai, P.T. ; Choi, H.W.
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Hong Kong, Hong Kong, China
Abstract :
Geometrical shaping of InGaN light-emitting diodes (LEDs) by laser micromachining is introduced. The sapphire substrate is shaped with inclined sidewalls at 50deg, serving as a prism favoring light redirection for out-coupling from the top window. Compared to conventional cuboid LEDs with a calculated light extraction efficiency etaext of 18.3%, these shaped LEDs offers a pronounced increase in etaext of up to 85.2%, verified by experimental results.
Keywords :
III-V semiconductors; gallium compounds; indium compounds; laser beam machining; light emitting diodes; micromachining; Al2O3; InGaN; geometrical shaping; laser micromachining; light extraction efficiency; light-emitting diode; prism; sapphire substrate; Laser micro-machining; light-emitting diodes (LEDs);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2009.2022751