Title :
Positive oxide charge-enhanced read disturb in a localized trapping storage flash memory cell
Author :
Tsai, Wen-Jer ; Yeh, Chih-Chieh ; Zous, Nian-Kai ; Liu, Chen-Chin ; Cho, Shih-Keng ; Wang, Tahui ; Pan, Samuel C. ; Lu, Chih-Yuan
Author_Institution :
Macronix Int. Co. Ltd., Hsinchu, Taiwan
fDate :
3/1/2004 12:00:00 AM
Abstract :
Read disturb-induced erase-state threshold voltage instability in a localized trapping storage Flash memory cell with a poly-silicon-oxide-nitride-oxide-silicon (SONOS) structure is investigated and reported. Our results show that positive trapped charge in bottom oxide generated during program/erase (P/E) cycles play a major role. Both gate voltage and drain voltage will accelerate the threshold voltage (Vt) drift. Hot-carrier caused disturb effect is more severe in a shorter gate length device at low temperature. A model of positive charge-assisted electron tunneling into a trapping nitride is proposed. Influence of channel doping on the Vt drift is studied. As the cell is in an "unbiased" storage mode, tunnel detrapping of positive oxide charges is responsible for the threshold voltage shift, which is insensitive to temperature.
Keywords :
electron traps; flash memories; silicon compounds; storage media; voltage dividers; wide band gap semiconductors; Flash EEPROM; MXVAND; NROM; PHINES; bottom oxide; channel doping; charge trapping; charge-assisted electron tunneling; cycling-induced oxide charges; drain voltage; erase-state threshold voltage instability; gate voltage; hot-carrier; localized trapping; poly-silicon-oxide-nitride-oxide-silicon; positive oxide charge-enhanced read disturbance; positive oxide charges; program-erase cycles; storage flash memory cell; threshold voltage shift; trapping nitride; tunnel detrapping; unbiased storage mode; voltage drift; Acceleration; Electrons; Flash memory cells; Hot carrier effects; Hot carriers; SONOS devices; Semiconductor process modeling; Temperature; Threshold voltage; Tunneling;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2003.822869