• DocumentCode
    903349
  • Title

    Resistivity of Thin Metal Films (Short Papers)

  • Author

    Chaurasia, H.K. ; Voss, W.A.G.

  • Volume
    21
  • Issue
    1
  • fYear
    1973
  • fDate
    1/1/1973 12:00:00 AM
  • Firstpage
    51
  • Lastpage
    52
  • Abstract
    It is shown that the sheet resistance, and hence the resistivity, of very thin metal films (<100 å) can be determined conveniently and accurately by microwave measurements. Accuracy is limited by VSWR measurement, film-holder design, and short-circuit quality. DC and microwave resistivity measurements are given for gold films on cleaved mica.
  • Keywords
    Circuits; Conductive films; Conductivity measurement; Electrical resistance measurement; Gold; Impedance measurement; Microwave measurements; Rectangular waveguides; Semiconductor films; Substrates;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.1973.1127915
  • Filename
    1127915
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=903349