• DocumentCode
    903404
  • Title

    Effects of high field generation of charge trapping in the oxide and interface traps on MOS capacitors and MOSFETs

  • Author

    Ito, Akira

  • Author_Institution
    Harris Semicond. Sector, Melbourne, FL, USA
  • Volume
    40
  • Issue
    7
  • fYear
    1993
  • fDate
    7/1/1993 12:00:00 AM
  • Firstpage
    1347
  • Lastpage
    1350
  • Abstract
    Oxide charge trapping and interface state generation phenomena under the various high-field stress conditions have been investigated using capacitors fabricated on both p-and n-type substrates, and p- and n-channel MOSFETs. It was found that prediction based on MOSFET devices yielded shorter lifetimes than predictions based on capacitors
  • Keywords
    electron traps; insulated gate field effect transistors; interface electron states; MOS capacitors; MOSFETs; charge trapping; high-field stress conditions; interface traps; lifetimes; oxide charge trapping; Capacitance-voltage characteristics; Degradation; Dielectric breakdown; Interface states; MOS capacitors; MOSFET circuits; Monitoring; Stress; Subthreshold current; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.216445
  • Filename
    216445