Title :
Measurement of donor density by pulsing Schottky-barrier diodes
Author_Institution :
University of Cambridge, Engineering Laboratory, Cambridge, UK
Abstract :
On applying a voltage pulse, which varies as the square of the time, to a Schottky-barrier diode the current flowing to store the charge is shown to have a close relation to the donor density. This gives an immediate and rapid assessment of the donor density with depth in a semiconductor.
Keywords :
measurement by electrical methods; semiconductor devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19680198
