Title :
Calibration-free heat source localisation in ICs entirely covered by metal layers
Author :
Altet, J. ; Salhi, M.A. ; Dilhaire, S. ; Ivanov, A.
Author_Institution :
Electron. Eng. Dept., Univ. Politecnica de Catalunya, Barcelona, Spain
Abstract :
The localisation of devices that generate periodically activated hot spots in a CMOS IC comprising five metal layers and metal fills is addressed. The feasibility of using the phase shift of the displacement of the uppermost metal layer due to thermal expansions is demonstrated.
Keywords :
CMOS integrated circuits; MOSFET; filler metals; phase shifters; thermal expansion; CMOS IC; calibration free heat source localisation; hot spots; metal fills; metal layers; phase shift; thermal expansion;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20040172
