Advanced CIM environment for manufacturing data analysis

The Harris semiconductor manufacturing systems organization has released a new environment for performing complex analyses of semiconductor manufacturing processes and IC products in its facilities worldwide. This innovative analysis toolset has increased the productivity of engineers by providing a method for complex manufacturing data reduction without the need for exhaustive training. The interactive, forms-based interface utility has also provided significant reductions in the time required to isolate parameters and identify relationships that significantly influence manufacturing yields. With little knowledge of data structures, query languages, or the underlying statistical analysis software, users of the system can access data in a variety of Harris worldwide locations and generate complex ad-hoc queries that result in statistics, histograms, box plots, and scatter plots. The more sophisticated user can enjoy the benefits of an open system. The foundation of the system is the internally developed, Unix-based manufacturing and engineering data base (MEDB). MEDB is a fully automated system for collecting and loading in-line manufacturing parameters, sample probe, wafer probe, and package test data from a variety of equipment platforms. The system is comprised of Harris proprietary database management software wrapped around the commercially available INGRES relational database product