DocumentCode
908245
Title
Analytic evaluation of diffused impurity layers in silicon
Author
Gupta, M.L. ; Bhattacharyya, A.B.
Author_Institution
Indian Institute of Technology, Department of Physics, New Delhi, India
Volume
6
Issue
9
fYear
1970
Firstpage
291
Lastpage
293
Abstract
An analytic method is outlined for the calculation of average conductivity of diffused layers in silicon for a complementary error function and Gaussian impurity profiles and the results are found to be in good agreement with those obtained by the numerical integration method. It is shown that the results for Gaussian distribution are obtained directly from the derivations for an error-function distribution. The method is also useful for the estimation of the temperature coefficient of the diffused layers.
Keywords
electrical conductivity; semiconductor doping;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19700205
Filename
4234697
Link To Document