• DocumentCode
    908245
  • Title

    Analytic evaluation of diffused impurity layers in silicon

  • Author

    Gupta, M.L. ; Bhattacharyya, A.B.

  • Author_Institution
    Indian Institute of Technology, Department of Physics, New Delhi, India
  • Volume
    6
  • Issue
    9
  • fYear
    1970
  • Firstpage
    291
  • Lastpage
    293
  • Abstract
    An analytic method is outlined for the calculation of average conductivity of diffused layers in silicon for a complementary error function and Gaussian impurity profiles and the results are found to be in good agreement with those obtained by the numerical integration method. It is shown that the results for Gaussian distribution are obtained directly from the derivations for an error-function distribution. The method is also useful for the estimation of the temperature coefficient of the diffused layers.
  • Keywords
    electrical conductivity; semiconductor doping;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19700205
  • Filename
    4234697