Title :
Surface Acoustic Wave Properties of Tantalum Pentoxide Thin Films on YX Quartz (Letters)
Author :
Weller, J.F. ; Giallorenzi, T.G.
fDate :
11/1/1974 12:00:00 AM
Abstract :
The properties of a Rayleigh surface wave propagating in tantalum oxide thin films on YX quartz are presented. Dispersion and acoustic wave loss measurements are made using the optical probe technique.
Keywords :
Acoustic measurements; Acoustic propagation; Acoustic waves; Dispersion; Loss measurement; Optical losses; Optical propagation; Optical surface waves; Surface acoustic waves; Transistors;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1974.1128399