DocumentCode
908331
Title
Surface Acoustic Wave Properties of Tantalum Pentoxide Thin Films on YX Quartz (Letters)
Author
Weller, J.F. ; Giallorenzi, T.G.
Volume
22
Issue
11
fYear
1974
fDate
11/1/1974 12:00:00 AM
Firstpage
973
Lastpage
975
Abstract
The properties of a Rayleigh surface wave propagating in tantalum oxide thin films on YX quartz are presented. Dispersion and acoustic wave loss measurements are made using the optical probe technique.
Keywords
Acoustic measurements; Acoustic propagation; Acoustic waves; Dispersion; Loss measurement; Optical losses; Optical propagation; Optical surface waves; Surface acoustic waves; Transistors;
fLanguage
English
Journal_Title
Microwave Theory and Techniques, IEEE Transactions on
Publisher
ieee
ISSN
0018-9480
Type
jour
DOI
10.1109/TMTT.1974.1128399
Filename
1128399
Link To Document