DocumentCode
908858
Title
Computer simulation of holographic grating exposure
Author
Dumas, R.H.M. ; Laybourn, P.J.R.
Volume
132
Issue
6
fYear
1985
fDate
12/1/1985 12:00:00 AM
Firstpage
331
Lastpage
335
Abstract
Detailed calculations have been made to obtain the profiles of optical grating structures formed in a photoresist film lying on multilayer reflective substrates. Because of the multiple reflections from the various interfaces, the exposed resist profile has a complex form which can be changed by adjusting the layer thicknesses. Some comparisons with experimental results are presented.
Keywords
digital simulation; holographic gratings; holographic grating exposure; layer thicknesses; multilayer reflective substrates; multiple reflections; photoresist film;
fLanguage
English
Journal_Title
Optoelectronics, IEE Proceedings J
Publisher
iet
ISSN
0267-3932
Type
jour
DOI
10.1049/ip-j.1985.0063
Filename
4644011
Link To Document