Title :
M.O.S.T. channel-length measurement
Author :
Bateman, I.M. ; Magowan, J.A.
Author_Institution :
Queen´s University of Belfast, Department of Electrical Engineering, Belfast, UK
Abstract :
A simple and accurate method of determining the channel length of m.o.s. transistors after manufacture is presented. The technique relies on various 3-terminal capacitance measurements, from which the gate-channel capacitance and hence channel length may be obtained.
Keywords :
bridge instruments; electric variables measurement; measurement; metal-insulator-semiconductor devices; 3 terminal bridge technique; MOST; channel length measurement; gate channel capacitance measurement;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19700464
