DocumentCode
910880
Title
M.O.S.T. channel-length measurement
Author
Bateman, I.M. ; Magowan, J.A.
Author_Institution
Queen´s University of Belfast, Department of Electrical Engineering, Belfast, UK
Volume
6
Issue
21
fYear
1970
Firstpage
669
Lastpage
671
Abstract
A simple and accurate method of determining the channel length of m.o.s. transistors after manufacture is presented. The technique relies on various 3-terminal capacitance measurements, from which the gate-channel capacitance and hence channel length may be obtained.
Keywords
bridge instruments; electric variables measurement; measurement; metal-insulator-semiconductor devices; 3 terminal bridge technique; MOST; channel length measurement; gate channel capacitance measurement;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19700464
Filename
4234968
Link To Document