• DocumentCode
    911090
  • Title

    Enhancement of Surface-Acoustic-Wave Piezoelectric Coupling in Three-Layer Substrates (Short Papebs)

  • Author

    Venema, A. ; Dekkers, J.J.M.

  • Volume
    23
  • Issue
    9
  • fYear
    1975
  • fDate
    9/1/1975 12:00:00 AM
  • Firstpage
    765
  • Lastpage
    767
  • Abstract
    Numerical results with respect to the piezoelectric coupling of a three-layer substrate (CdS-SiO2-Si) are presented. <111> -cut Si is used, and the direction of propagation is [11
  • Keywords
    Acoustic devices; Acoustic transducers; Difference equations; Electromagnetic waveguides; Piezoelectric films; Piezoelectric transducers; Silicon; Substrates; Waveguide components; Zinc oxide;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.1975.1128672
  • Filename
    1128672