• DocumentCode
    911349
  • Title

    Diffusion of boron, phosphorus, arsenic, and antimony into

  • Author

    Chan, Tak-Ming Cyrus

  • Volume
    58
  • Issue
    4
  • fYear
    1970
  • fDate
    4/1/1970 12:00:00 AM
  • Firstpage
    588
  • Lastpage
    589
  • Abstract
    The diffusions of boron, phosphorus, arsenic, and antimony into
  • Keywords
    Boron; Electrical resistance measurement; Fourier transforms; Holographic optical components; Holography; Image reconstruction; Optical filters; Optical modulation; Silicon; Temperature distribution;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1970.7699
  • Filename
    1449629
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=911349