Physical and numerical verification of discharge calculations

Calculations of radio frequency discharge parameters, and to a lesser extent DC discharge parameters, are apparently highly sensitive to the physical model used. The testing of numerical schemes for error, considering alternative formulations and simple physical models, is carefully considered. Within kinetic models a number of options exist, having different capabilities, the implications of which are examined. Particle simulations are discussed, and mesh-based kinetic calculations are considered in detail. An efficient and accurate mesh-based kinetic model which closely replicates the physical processes taking place is presented. Ways to improve its accuracy, which is limited by the resolution of the mesh, and their effects are presented. Cross-checking of various numerical formulations shows that the results for each are essentially the same. Physical reasoning and simple estimates of discharge parameters are used to further substantiate the predictions for a particular discharge, and the processes taking place in an RF discharge in helium are described in detail