Title :
On-chip integrated optic mirrors in Ti: LiNbO3 by ion-beam micromachining
Author :
Syms, R.R.A. ; Syms, Richard R. A. ; Watkins, R.E.J.
Author_Institution :
Rutherford Appleton Laboratory, EBLF Group, Didcot, UK
fDate :
10/1/1987 12:00:00 AM
Abstract :
A complete process is described whereby on-chip mirrors may be fabricated in Ti : LiNbO3 stripe waveguide devices using micro-focal ion-beam machining. Experimental results are presented for a device operating at 1.523 ¿m wavelength, TM mode. An interferometric technique is used to distinguish the reflection from the on-chip mirror from other spurious reflections. Approximately 24% power reflectivity is observed. Results are compared with a simple theoretical model of the chip response under different conditions, and good agreement is obtained.
Keywords :
integrated optics; ion beam applications; lithium compounds; machining; mirrors; optical waveguides; optical workshop techniques; titanium; 1.523 micron; LiNbO3:Ti; TM mode; integrated optic mirrors; interferometric technique; ion-beam micromachining;
Journal_Title :
Optoelectronics, IEE Proceedings J
DOI :
10.1049/ip-j:19870045
