DocumentCode
913784
Title
Parameter Extraction for Statistical IC Process Characterization
Author
Spanos, Costas J B ; Director, Stephen W.
Author_Institution
Digital Equipment Corporation, Hudson, MA, USA
Volume
5
Issue
1
fYear
1986
fDate
1/1/1986 12:00:00 AM
Firstpage
66
Lastpage
78
Abstract
It is well known that the integrated circuit (IC) manufacturing process is subject to inherent statistical fluctuations of material quality and equipment performance. Characterization of these fluctuations is important if the performance of an IC manufacturing facility is to be simulated and optimized. In this paper we present a general methodology for determining the statistical moments associated with a set of independently varying parameters, that are principally responsible for the fluctuations in the IC manufacturing process. This methodology has been implemented in a program called PROMETHEUS. A method for the formal statistical verification of the extracted moments is also presented.
Keywords
Circuit simulation; Fabrics; Fluctuations; Integrated circuit modeling; Manufacturing processes; Parameter extraction; Probability density function; Production facilities; Solid modeling; Statistics;
fLanguage
English
Journal_Title
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
Publisher
ieee
ISSN
0278-0070
Type
jour
DOI
10.1109/TCAD.1986.1270178
Filename
1270178
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