Title :
Sputtered ZnO surface-wave transducers
Author :
Evans, D.R. ; Lewis, M.F. ; Patterson, E.
Author_Institution :
General Electric Co., Central Research Laboratories, Hirst Research Centre, Wembley, UK
Abstract :
Surface waves have been excited efficiently on fused silica using sputtered ZnO films in conjunction with various transducer arrangements. The results are very promising and have yielded values of K2 up to 0.76%.
Keywords :
acoustic transducers; sputtering; surface phenomena; thin film devices; transducers; zinc compounds; 35 MHz; ZnO; piezoelectric materials; piezoelectric transducers; sonic transducers; surface acoustic wave devices; surface phenomena; surface wave propagation; thin films;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19710376
