DocumentCode :
914859
Title :
Mercuric Ion Sensing by a Film Bulk Acoustic Resonator
Author :
Zhang, Hao ; Marma, Mong S. ; Kim, Eun Sok ; McKenna, Charles E. ; Thompson, Mark E.
Author_Institution :
Southern California Univ., Los Angeles
Volume :
54
Issue :
9
fYear :
2007
fDate :
9/1/2007 12:00:00 AM
Firstpage :
1723
Lastpage :
1725
Abstract :
This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10-9 M Hg2+ (0.2 ppb Hg2+) in water. Other ions such as K+, Ca2+, Mg2+, Zn2+, and Ni2+ had little or no effect on the resonant frequency of the FBAR. Coating of the FBAR Au surface with a self-assembled monolayer (SAM) of 4-mercaptobenzoic acid decreased the Hg2+ response.
Keywords :
acoustic resonators; bulk acoustic wave devices; gold; mass measurement; 4-mercaptobenzoic acid; Au - Element; FBAR; aqueous solution; film bulk acoustic resonator; mercuric ion sensing; self-assembled monolayer; Acoustic sensors; Acoustic signal detection; Chemical sensors; Contamination; Film bulk acoustic resonators; Gold; Resonant frequency; Sensor arrays; Silicon; Water pollution; Acoustics; Equipment Design; Equipment Failure Analysis; Ions; Membranes, Artificial; Mercury; Sensitivity and Specificity; Solutions; Transducers; Vibration; Water;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2007.456
Filename :
4337732
Link To Document :
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