DocumentCode
915429
Title
Recovery of submicrometer pMOSFETs from hot carrier degradation by high field injection
Author
Zhang, Jian F. ; Taylor, Stephen ; Eccleston, W. ; Barlow, K.
Author_Institution
Liverpool John Moores Univ., UK
Volume
29
Issue
12
fYear
1993
fDate
6/10/1993 12:00:00 AM
Firstpage
1097
Lastpage
1099
Abstract
Charge carrier tunnelling into gate oxide under high field strength (e.g. 8 MV/cm) is found to be an efficient method for the recovery of hot electron induced pMOSFET degradation, including hot electron induced punchthrough effects. The physical processes responsible for the recovery are investigated.
Keywords
high field effects; hot carriers; insulated gate field effect transistors; life testing; semiconductor device testing; tunnelling; charge carrier tunnelling; gate oxide; high field injection; high field strength; hot carrier degradation; hot electron induced pMOSFET degradation; lifetime; physical processes; punchthrough effects; recovery; submicrometre pMOSFET;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19930732
Filename
220828
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