• DocumentCode
    915673
  • Title

    Dynamic Microfluidic Photomasking

  • Author

    McKechnie, Jonathan ; Sinton, David

  • Author_Institution
    Univ. of Victoria, Victoria
  • Volume
    16
  • Issue
    5
  • fYear
    2007
  • Firstpage
    1145
  • Lastpage
    1151
  • Abstract
    This paper presents a novel microfluidic photomasking strategy. Laminar microfluidic streaming is exploited to achieve photomasking with dynamic spatial control. Two light-absorbing streams hydrodynamically focus a transparent stream to define a line of light transmission. A device incorporating two such microfluidic layers, which are aligned orthogonally, enables light transmission only where the transparent streams overlap. Control of fluid flow in the microfluidic layers enables dynamic spatial control of the exposed region. The dynamic microfluidic photomasking strategy is tested through transmitted light microscopy and applied to microfabrication via photoresist patterning. When applied to microfabrication in a frontal photopolymerization mode, this method affords both planar and depthwise control of feature geometry.
  • Keywords
    laminar flow; masks; microfluidics; photoresists; dynamic microfluidic photomasking; dynamic spatial control; laminar microfluidic streaming; light transmission; light-absorbing streams; microfabrication; photopolymerization; photoresist patterning; Costs; DNA; Fabrication; Fluid dynamics; Fluid flow control; Microfluidics; Probes; Resists; Sequences; Testing; Focusing; hydrodynamics; microfluidics; optofluidics; photomasking;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2007.900878
  • Filename
    4337800