DocumentCode
915673
Title
Dynamic Microfluidic Photomasking
Author
McKechnie, Jonathan ; Sinton, David
Author_Institution
Univ. of Victoria, Victoria
Volume
16
Issue
5
fYear
2007
Firstpage
1145
Lastpage
1151
Abstract
This paper presents a novel microfluidic photomasking strategy. Laminar microfluidic streaming is exploited to achieve photomasking with dynamic spatial control. Two light-absorbing streams hydrodynamically focus a transparent stream to define a line of light transmission. A device incorporating two such microfluidic layers, which are aligned orthogonally, enables light transmission only where the transparent streams overlap. Control of fluid flow in the microfluidic layers enables dynamic spatial control of the exposed region. The dynamic microfluidic photomasking strategy is tested through transmitted light microscopy and applied to microfabrication via photoresist patterning. When applied to microfabrication in a frontal photopolymerization mode, this method affords both planar and depthwise control of feature geometry.
Keywords
laminar flow; masks; microfluidics; photoresists; dynamic microfluidic photomasking; dynamic spatial control; laminar microfluidic streaming; light transmission; light-absorbing streams; microfabrication; photopolymerization; photoresist patterning; Costs; DNA; Fabrication; Fluid dynamics; Fluid flow control; Microfluidics; Probes; Resists; Sequences; Testing; Focusing; hydrodynamics; microfluidics; optofluidics; photomasking;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2007.900878
Filename
4337800
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