Title :
Gallium In-Diffusion for the Fabrication of Lithium Niobate Optical Waveguides
Author :
Huang, Wen-Hung ; Wang, Way-Seen
Author_Institution :
Nat. Taiwan Univ., Taipei
Abstract :
Gallium oxide used as a diffusion source for the fabrication of lithium niobate optical waveguides is presented. The optical waveguide properties are investigated and the behavior of the in-diffused gallium is characterized by the secondary ion mass spectroscopy. Single-mode single-polarization optical waveguides with low propagation loss at 632.8 and 1550 nm can be obtained. For reference, the diffusion constant and activation energy of the in-diffused gallium atoms are also obtained.
Keywords :
gallium compounds; lithium compounds; optical waveguides; secondary ion mass spectra; activation energy; diffusion constant; gallium in-diffusion; lithium niobate optical waveguides; secondary ion mass spectroscopy; single-mode single-polarization optical waveguides; Atom optics; Gallium; Lithium niobate; Nonlinear optics; Optical device fabrication; Optical films; Optical pumping; Optical waveguides; Particle beam optics; Substrates; Directional coupler; integrated optics; lithium niobate ($hbox{LiNbO}_{3}$ ); optical waveguide;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.905182
