DocumentCode
916336
Title
Geometrical correction terms for contact regions of diffused resistors
Author
Chawla, B.R.
Volume
59
Issue
2
fYear
1971
Firstpage
305
Lastpage
307
Abstract
Geometrical correction terms for "dog-bone" shaped contacts made to diffused resistors are normally estimated by averaging the lower and upper limits for the correction. In this letter an analytical expression, based on curve-fitting of accurate numerical calculations for the correction term, is found which describes the correction terms for most practical dimensions with acceptable accuracy.
Keywords
Conductivity; Contact resistance; Curve fitting; Distributed computing; Geometry; Metallization; Resistors; Solids; Transistors;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1971.8151
Filename
1450081
Link To Document