• DocumentCode
    916746
  • Title

    Two-Laser Lithography Shrinks Transistors on the Cheap

  • Author

    Das, Saswato R.

  • Volume
    46
  • Issue
    6
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    16
  • Lastpage
    16
  • Abstract
    Engineers are near the outer limits of what can be done with optical lithography, the process by which light shone through a patterned mask defines the fine structures of microprocessors and memory chips. Now three teams of optics experts have independently hit upon what could turn out to be a way to extend optical lithography¿s use¿and, what¿s even more critical, to do it cheaply.
  • Keywords
    Biomass; Ethanol; Lithography; Microscopy; Moisture; Printing; Transistors;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.2009.4977597
  • Filename
    4977597