DocumentCode :
916746
Title :
Two-Laser Lithography Shrinks Transistors on the Cheap
Author :
Das, Saswato R.
Volume :
46
Issue :
6
fYear :
2009
fDate :
6/1/2009 12:00:00 AM
Firstpage :
16
Lastpage :
16
Abstract :
Engineers are near the outer limits of what can be done with optical lithography, the process by which light shone through a patterned mask defines the fine structures of microprocessors and memory chips. Now three teams of optics experts have independently hit upon what could turn out to be a way to extend optical lithography¿s use¿and, what¿s even more critical, to do it cheaply.
Keywords :
Biomass; Ethanol; Lithography; Microscopy; Moisture; Printing; Transistors;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2009.4977597
Filename :
4977597
Link To Document :
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