DocumentCode
916746
Title
Two-Laser Lithography Shrinks Transistors on the Cheap
Author
Das, Saswato R.
Volume
46
Issue
6
fYear
2009
fDate
6/1/2009 12:00:00 AM
Firstpage
16
Lastpage
16
Abstract
Engineers are near the outer limits of what can be done with optical lithography, the process by which light shone through a patterned mask defines the fine structures of microprocessors and memory chips. Now three teams of optics experts have independently hit upon what could turn out to be a way to extend optical lithography¿s use¿and, what¿s even more critical, to do it cheaply.
Keywords
Biomass; Ethanol; Lithography; Microscopy; Moisture; Printing; Transistors;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.2009.4977597
Filename
4977597
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