Title :
Use of Attenuation and Phase Delay Characteristics of SAW to Measure Air-Gap Height (Technical Notes)
Author :
Crowley, J.D. ; Weller, J.F. ; Giallorenzi, T.G.
fDate :
2/1/1978 12:00:00 AM
Abstract :
The attenuation and phase delay characteristics of a SAW which has been perturbed by a metallic plane above the surface of a piezoelectric delay line have been theoretically computed and experimentally measured. These measurements provide a diagnostic tool for determining the height of an air gap and for determining the minimum achievable air gap for a particular supporting structure.
Keywords :
Air gaps; Attenuation measurement; Delay lines; Dielectric constant; Optical surface waves; Phase measurement; Piezoelectric films; Substrates; Surface acoustic waves; Surface waves;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1978.1129329
