A Model-Based Processor Design for Smart Microsensor Arrays [Applications Corner]

In this article, we discuss the design of a smart-physics-based processor for microcantilever sensor arrays. The processor is coupled to a microelectromechanical sensor and estimates the presence of critical materials or chemicals in solution. We first briefly present microcantilever sensors and then discuss the microcantilever sensor array design, which consists of the cantilever physics propagation model, cantilever array measurement model, model-based parameter estimator design, and model-based processor (MBP) design. Finally, we end with experimental results and conclusions