Gallium arsenide self-aligned gate field-effect transistors

A technique is described for automatically aligning the gate contact of a gallium arsenide microwave-frequency Schottky-barrier field-effect transistor between the source and drain contacts. This technique consists of etching part of the epitaxial gallium arsenide layer from beneath the edge of the source and drain contacts and using the resulting overhang as an evaporation mask for the gate contact metal. Microwave measurements were made on a device fabricated in this manner with a 4-µ gate length. Maximum available gain measurements yield 16 dB at 2 GHz falling off at 6 dB/octave to a cutoff frequency of 11 GHz.