Title :
Imaging of the Asymmetric DC Discharge: Visualization to Adjust Plasma in the Novel PECVD Reactor
Author :
Primc, Gregor ; Levchenko, Igor ; Kumar, Sudhakar ; Cvelbar, Uros ; Mozetic, Miran ; Ostrikov, K.
Author_Institution :
Commonwealth Sci. & Ind. Res. Organ., Lindfield, NSW, Australia
Abstract :
Normal asymmetric glow dc discharge in the thermal furnace converted into the efficient PECVD system was imaged to adjust the structure of the plasma column to the two possible localizations of the process zone. The visualization revealed the possibility to use short and long discharge configurations for the plasma-enabled growth and processing of various nanostructures in the modified setup. Images of the discharge in the two localizations are presented.
Keywords :
glow discharges; plasma CVD; plasma diagnostics; PECVD reactor; asymmetric DC discharge imaging; discharge configurations; nanostructures; normal asymmetric glow dc discharge; plasma adjustment; plasma column; plasma-enabled growth; thermal furnace; visualization; Cathodes; Discharges (electric); Fault location; Furnaces; Plasmas; Nanotechnology; PECVD; plasma applications; plasma applications.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2315789
