DocumentCode
91909
Title
Imaging of the Asymmetric DC Discharge: Visualization to Adjust Plasma in the Novel PECVD Reactor
Author
Primc, Gregor ; Levchenko, Igor ; Kumar, Sudhakar ; Cvelbar, Uros ; Mozetic, Miran ; Ostrikov, K.
Author_Institution
Commonwealth Sci. & Ind. Res. Organ., Lindfield, NSW, Australia
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2564
Lastpage
2565
Abstract
Normal asymmetric glow dc discharge in the thermal furnace converted into the efficient PECVD system was imaged to adjust the structure of the plasma column to the two possible localizations of the process zone. The visualization revealed the possibility to use short and long discharge configurations for the plasma-enabled growth and processing of various nanostructures in the modified setup. Images of the discharge in the two localizations are presented.
Keywords
glow discharges; plasma CVD; plasma diagnostics; PECVD reactor; asymmetric DC discharge imaging; discharge configurations; nanostructures; normal asymmetric glow dc discharge; plasma adjustment; plasma column; plasma-enabled growth; thermal furnace; visualization; Cathodes; Discharges (electric); Fault location; Furnaces; Plasmas; Nanotechnology; PECVD; plasma applications; plasma applications.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2315789
Filename
6804758
Link To Document