DocumentCode
919413
Title
Microwave measurement of surface conductivity and permittivity of thin layers in an E010 resonator
Author
Frey, Wolfgang
Author_Institution
AEG-Telefunken, Forschungsinstitut, Ulm, West Germany
Volume
8
Issue
19
fYear
1972
Firstpage
486
Lastpage
488
Abstract
A simple microwave method for measuring the surface conductivity and permittivity of thin layers, such as epitaxial semiconductors on semi-insulating substrates, is proposed, and is shown to be of high accuracy at X band frequencies.
Keywords
cavity resonators; electrical conductivity measurement; microwave measurement; permittivity measurement; semiconductor thin films; cavity resonator; conductivity measurement; microwave measurement; permittivity measurement; semiconductor thin film;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19720350
Filename
4235811
Link To Document