DocumentCode
919571
Title
Electromigration and failure in electronics: An introduction
Author
d´Heurle, F.M.
Volume
59
Issue
10
fYear
1971
Firstpage
1409
Lastpage
1418
Abstract
Some fundamental aspects of electromigration phenomena as they have been studied in "bulk" metallic conductors are reviewed. In an electric field atoms are subjected to a force due to the field, and to a force which results from the motion of electrical carriers, electrons, or holes. In bulk samples, and at high temperatures, these forces cause the displacement of atoms by a lattice mechanism which is also responsible for the diffusion of atoms in a concentration gradient. In thin films, electromigration has been found to occur at lower temperatures (and higher current densities) by a grain boundary diffusion mechanism. Electromigration may cause failures at material discontinuities, such as found at terminals, at temperature gradients, or at structural inhomogeneities. The process of crack formation, as observed in aluminum thin films, is described. Failure times are a function of the activation energy for diffusion and of exponents of the current density which vary for different failure modes. The effects of film purity, orientation, grain size, glass overcoat, and solute additions on lifetime are reviewed. Practical guidelines for the design of thin-film interconnections, and for the interpretation of accelerated test data are given.
Keywords
Aluminum; Charge carrier processes; Conductors; Current density; Electromigration; Grain boundaries; Grain size; Lattices; Temperature; Transistors;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1971.8447
Filename
1450377
Link To Document