DocumentCode
919969
Title
Manufacture and testing of prototype microturbine module
Author
Leonard, M. ; Dhariwal, R.S.
Author_Institution
Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
Volume
42
Issue
8
fYear
2006
fDate
4/13/2006 12:00:00 AM
Firstpage
460
Lastpage
462
Abstract
The practical testing of a prototype microturbine module has shown that the levitation of the rotor that was predicted from previous simulation results does indeed take place and can enhance the performance of the device since contact friction can be considerably reduced. Some preliminary results on the operation of the module are presented.
Keywords
LIGA; friction; micromechanical devices; rotors; turbines; MEMS; UV-LIGA process; contact friction; microturbine module manufacture; microturbine module testing; rotor levitation;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20060400
Filename
1624747
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