• DocumentCode
    919986
  • Title

    Two-dimensional analysis of planar diffusion

  • Author

    Vandorpe, D. ; Monnier, J.

  • Author_Institution
    Institut de Physique Nucléaire de Lyon, Villeurbanne, France
  • Volume
    8
  • Issue
    23
  • fYear
    1972
  • Firstpage
    554
  • Lastpage
    555
  • Abstract
    A 2-dimensional numerical analysis of diffusion phenomena in semiconductors is presented. This analysis takes into account nearly all the physical phenomena known for diffusion in semiconductors, and accurate information on lateral diffusion is obtained.
  • Keywords
    diffusion in solids; numerical analysis; semiconductor device models; physical phenomena; planar diffusion; semiconductor device models; two dimensional numerical analysis;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19720404
  • Filename
    4235869
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=919986